
Customizable Chemical Vapor Deposition CVD Tuber Furnace with Gas System for Film Growing. Low Temperature Deposition: Plasma activation enables chemical vapor deposition at low temperatures for enhanced reaction efficiency. Customizable Heating Zones: Available in single, dual, or triple heating zones based on specific process requirements. Flexible Tube Materials: Tube material can be customized to quartz, corundum, alloy, or other materials. Adjustable Plasma Power: Plasma generator power options include 150W, 300W, 500W, and 1000W for various applications. Multi-Channel Gas System: Flow meter options range from 1 to 3 or multi-channel based on specific process needs. Wide Film Application: Suitable for depositing SiOx, SiNx, amorphous silicon, and other films on various substrates.