Compact 4-Inch Vacuum Wafer Spin Coating Machine with Aluminum Alloy Body. High precision power system, uniform and controllable film thickness. Equipped with brushless servo DC motor, the speed range is 100-12000rpm, the speed resolution is 1rpm and the speed stability in the full speed range is 1%. Multi segment program editing, one click solidification of mature technology Support the free setting of 5-8 process steps. Compact desktop structure, suitable for small spaces The whole machine is designed for miniaturization, specially customized for 4-inch (100mm) wafers. The body occupies a small area, and the equipmen.