
20MHz 5L Plasma Cleaner/Cleaning Machine for Sensitive Product. Electrode-Free Design: No internal electrode plates prevent metal ion contamination for pristine surface treatment. High-Purity Quartz Chamber: 5L cylindrical quartz chamber ensures uniform plasma glow and excellent chemical reactivity. Precise Parameter Control: Fully customizable RF power, duration, and vacuum level via intelligent PLC and HMI touchscreen. High-Precision Gas Control: Dual-channel float flowmeters allow accurate control for various process gases like argon and oxygen. Versatile Application: Ideal for semiconductors, medical devices, precision optics, and microfabrication residue removal. Customizable Options: The product supports customized configurations to meet specific user requirements.